THIN Al / Surface preservation

Thin aluminum layers: attention to sensitive metal surfaces

Actual decapsulation images from thin-aluminum-layer samples support evaluation of surface integrity, contamination residue and downstream analysis requirements.

Thin aluminum layers: attention to sensitive metal surfaces

Sample and analysis objective

When the target includes a thin aluminum layer and surrounding structures, define the metal areas to preserve, permissible surface changes and required follow-up measurements in advance.

ItemCase information
Material of interestThin aluminum layers and related metal regions
Image recordMicroscopy after decapsulation
Further verificationMetal surface condition and necessary film-thickness and electrical measurements

Processing record

The source image supports observation of the die surface and bonding region. No aluminum thickness, before-and-after thickness change or electrical change is provided, so material loss cannot be quantified from it.

Actual sample images

Die and bonding regions after decapsulation of a thin-aluminum-layer sample.
Die and bonding regions after decapsulation of a thin-aluminum-layer sample.

Result review priorities

  • Inspect target surfaces at consistent magnification and illumination.
  • If a metal-loss limit is required, add film-thickness or cross-sectional measurements.
  • Evaluate surface observability and electrical preservation separately.

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Every solution starts with a sample.

Tell us about the package, your analysis objective and the structures to preserve. Together, we can define a suitable decapsulation process.

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