PLASMA ONLY / No laser preprocessing

Plasma-only decapsulation: staged records from two samples

The source records approximately 4 hours for an A13-marked sample and approximately 3 hours for another package, both using plasma only without laser preprocessing.

Plasma-only decapsulation: staged records from two samples

Sample and analysis objective

When the sample strategy excludes laser preprocessing, evaluate a plasma-only route and use stage records to control removal and target exposure.

ItemCase information
A13-marked sampleApproximately 4 hours; plasma only, no laser
Another package sampleApproximately 3 hours; plasma only, no laser
Nature of the time recordsRecords for the displayed samples, not universal cycle times

Sample A · Four stages of decapsulation

Four stages follow the A13-marked sample from an intact package to completed decapsulation. This plasma-only case used no laser and recorded approximately 4 hours in total.

01 · Before decapsulation — The intact package surface retains the A13 marking.
01 · Before decapsulationThe intact package surface retains the A13 marking.
02 · Progressive removal — Encapsulant removal has begun; the dies remain covered.
02 · Progressive removalEncapsulant removal has begun; the dies remain covered.
03 · Dies becoming exposed — Two dies are visible, with localized surface residue remaining.
03 · Dies becoming exposedTwo dies are visible, with localized surface residue remaining.
04 · Decapsulation complete — Die surfaces and surrounding bond regions are visible.
04 · Decapsulation completeDie surfaces and surrounding bond regions are visible.

Sample B · Before and after decapsulation

A separate package is shown before and after treatment. This plasma-only case recorded approximately 3 hours.

01 · Before decapsulation — The package exterior and device markings remain visible.
01 · Before decapsulationThe package exterior and device markings remain visible.
02 · Decapsulation complete — The central opening exposes the target die region.
02 · Decapsulation completeThe central opening exposes the target die region.

Result review priorities

  • Assess plasma-only suitability based on material and package thickness.
  • Record intermediate stages; do not control the endpoint by elapsed time alone.
  • Review target-region residue, surface changes and subsequent electrical requirements separately.

Explore related processes and equipment →

← Back to cases
LET’S TALK

Every solution starts with a sample.

Tell us about the package, your analysis objective and the structures to preserve. Together, we can define a suitable decapsulation process.

Application image preview