What is in-situ decapsulation?

After the specimen is loaded and the cycle is started, each decapsulation step runs automatically inside the same system. Operators do not need to transfer the specimen between laser, plasma and cleaning equipment. The automatic cycle runs from laser processing through final imaging without manual intervention.

How does one-click decapsulation work?

After product characterization and process validation, save the product recipe. For a subsequent compatible specimen, load it, recall the recipe and start. One-click operation reuses a validated process; if the package, materials or analysis objective changes, confirm the process and update the recipe first.

What are the benefits of MIP decapsulation?

MIP offers a controllable resin-removal route that reduces acid exposure and direct mechanical contact, progressively exposes delicate structures and aims to retain useful failure evidence. Selectivity depends on matching the recipe to the materials and validating it on representative samples.

What is microwave-induced plasma (MIP)?

MIP stands for Microwave-Induced Plasma. In chip decapsulation, microwave energy excites a process gas to generate reactive species, primarily oxygen radicals, that react with organic encapsulation resin. Gradual removal exposes the die, bond wires, pads and interconnect regions. ICDECAP uses an argon/oxygen process route focused on selective organic-resin removal. Inorganic fillers such as silica may require a separate cleaning step after the resin recedes. Organic materials, fillers and metals respond differently, so their endpoints must be assessed separately.

What is atmospheric-pressure MIP?

Atmospheric-pressure MIP uses microwave-induced plasma to remove organic encapsulation materials near ambient atmospheric pressure. No vacuum environment is required for decapsulation, simplifying sample loading, staged inspection and integration with other preparation steps.

Which decapsulation problems can MIP address?

MIP is useful when the goal is to expose fine metal features, thin pads, buried interconnects or foreign matter that may be affected by acid chemistry or continued mechanical removal. It provides a finishing step tailored to the materials and analysis objective. Stop at sufficient exposure. MIP can also remove organic protective layers that need to remain and may modify some material surfaces. Include gas recipe, power, temperature, exposure time and filler cleaning in DOE. Inspect at exposure and verify electrical preservation through measurement.

IDECAP / PRECISION SYSTEMS

Laser & plasma

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In-situ Decapsulation System (Laser & Plasma)

iPlasma Pro

Laser and atmospheric-pressure MIP, integrated in one system for in-situ decapsulation. Load the specimen and start: laser, plasma, cleaning, blow-drying and imaging run automatically. Validate the process, save the recipe and repeat with one-click operation for compatible specimens.

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